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Review on the progress of ultra-precision machining technologies

Julong YUAN, Binghai LYU, Wei HANG, Qianfa DENG

《机械工程前沿（英文）》 2017年第12卷第2期页码 158-180 doi: 10.1007/s11465-017-0455-9

摘要：

Ultra-precision machining technologies are the essential methods, to obtain the highest form accuracy and surface quality. As more research findings are published, such technologies now involve complicated systems engineering and been widely used in the production of components in various aerospace, national defense, optics, mechanics, electronics, and other high-tech applications. The conception, applications and history of ultra-precision machining are introduced in this article, and the developments of ultra-precision machining technologies, especially ultra-precision grinding, ultra-precision cutting and polishing are also reviewed. The current state and problems of this field in China are analyzed. Finally, the development trends of this field and the coping strategies employed in China to keep up with the trends are discussed.

关键词： ultra-precision grinding ultra-precision cutting ultra-precision polishing research status in China development tendency

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Research progress on ultra-precision machining technologies for soft-brittle crystal materials

Hang GAO,Xu WANG,Dongming GUO,Yuchuan CHEN

《机械工程前沿（英文）》 2017年第12卷第1期页码 77-88 doi: 10.1007/s11465-017-0411-8

摘要：

Soft-brittle crystal materials are widely used in many fields, especially optics and microelectronics. However, these materials are difficult to machine through traditional machining methods because of their brittle, soft, and anisotropic nature. In this article, the characteristics and machining difficulties of soft-brittle and crystals are presented. Moreover, the latest research progress of novel machining technologies and their applications for soft-brittle crystals are introduced by using some representative materials (e.g., potassium dihydrogen phosphate (KDP), cadmium zinc telluride (CZT)) as examples. This article reviews the research progress of soft-brittle crystals processing.

关键词： brittle soft functional crystal ultra-precision machining

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Special issue: Ultra-precision machining

Zhuangde JIANG,Dongming GUO

《机械工程前沿（英文）》 2017年第12卷第1期页码 1-2 doi: 10.1007/s11465-017-0445-y

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Model reduction techniques for dynamics analysis of ultra-precision linear stage

Xuedong CHEN, Zhixin LI

《机械工程前沿（英文）》 2009年第4卷第1期页码 64-70 doi: 10.1007/s11465-009-0009-x

摘要： Spring-damping elements are used to simplify the internal interaction in the proposed finite element (FE) model of an ultra-precision linear stage. The dynamics behavior is studied. The comparison between mode shapes from the eigenvalue analysis shows that the components, except the translator, can represent system dynamics characteristics. A reduction approach is used to simplify the system in a dynamic studied. There is little difference between the vibration mode and the response analysis. The experimental modal analysis proves the validity of the reduction approach, which can be generalized to the development and dynamics characteristic study of a complex system model to obviously save computational resource.

关键词： dynamics analysis air-bearing linear stage reduction

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Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials

Xiaoguang GUO,Qiang LI,Tao LIU,Renke KANG,Zhuji JIN,Dongming GUO

《机械工程前沿（英文）》 2017年第12卷第1期页码 89-98 doi: 10.1007/s11465-017-0412-7

摘要：

Hard and brittle materials, such as silicon, SiC, and optical glasses, are widely used in aerospace, military, integrated circuit, and other fields because of their excellent physical and chemical properties. However, these materials display poor machinability because of their hard and brittle properties. Damages such as surface micro-crack and subsurface damage often occur during machining of hard and brittle materials. Ultra-precision machining is widely used in processing hard and brittle materials to obtain nanoscale machining quality. However, the theoretical mechanism underlying this method remains unclear. This paper provides a review of present research on the molecular dynamics simulation of ultra-precision machining of hard and brittle materials. The future trends in this field are also discussed.

关键词： MD simulation ultra-precision machining hard and brittle materials machining mechanism review

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Air-bearing position optimization based on dynamic characteristics of ultra-precision linear stages

CHEN Xuedong, LI Zhixin

《机械工程前沿（英文）》 2008年第3卷第4期页码 400-407 doi: 10.1007/s11465-008-0060-z

摘要： Air-bearings are installed between the stator and the mover of ultra-precision linear stages to suppress vibration and mechanical contact. Spring-damping elements are used to emulate the complex interaction of the finite element model (FEM) developed in this paper and the system dynamic behaviors are analyzed. Through the experimental modal test, the validity and reliability of the model are proven. However, the dynamic characteristics including mode frequency, mode shape, and response amplitude are obviously changed with the position of air-bearings. The combined optimization method is used to optimize the air-bearings position. The best and worst positions are obtained using the dynamic characteristic analysis. The method can be generalized to the connection position of different components in manufacture elements and to implement the system dynamic characteristics optimization when the connection position can be changed.

关键词： manufacture different interaction air-bearings response amplitude

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Electrorheological damper for the ultra-precision air bearing stage

ZHU Yu, JIA Songtao, CHEN Yaying, LI Guang

《机械工程前沿（英文）》 2008年第3卷第2期页码 158-163 doi: 10.1007/s11465-008-0031-4

摘要： This paper illustrates how the electrorheological damper substantially improves the performance of the ultra-precision air bearing stage. Smart materials such as electrorheological fluids have attracted many researchers’ attention because of their resistance changeable performance in different electric fields. Meanwhile, the ultra-precision air bearing stage driven by the linear-motor is characterized by zero mechanical damping and poor anti-disturbance. To solve this problem and consider the characteristics of electrorheological fluids, an electrorheological damper is proposed in this paper. The electrorheological damper’s characteristics in high electric fields are obtained based on the Eyring constitutive model, which smoothly transits from the pre-yield to post-yield region. To enhance the performance of the electrorheological damper, which takes effect only when the stage is going to decelerate or position, the on-off and sliding mode control methods design and optimize the controller. The results prove that by using the advanced sliding mode control method, the characteristics of the ultra-precision air bearing stage can be effectively improved through the introduction of the electrorheological damper.

关键词： post-yield linear-motor advanced sliding pre-yield position

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高端光学元件超精密加工技术与装备发展研究

蒋庄德, 李常胜, 孙林, 段端志, 康城玮, 陈杉杉, 林启敬, 杨树明

《中国工程科学》 2023年第25卷第1期页码 131-141 doi: 10.15302/J-SSCAE-2023.07.003

摘要：

高端光学元件是决定高端装备性能水平的核心零件，研究高端光学元件超精密加工技术与装备发展，对于实施制造强国战略、满足高端装备产业需求具有积极意义。本文剖析了光学元件超精密加工方法与装备、高性能基础部件、超精密光学加工中的测量方法与装备等的发展情况，凝练了精度与尺寸极端化、形状与性能一体化、加工工艺复合化、加工与检测一体化、装备与工艺智能化等发展趋势。通过广泛的行业调研和研讨，从需求、目标、产品、关键技术、应用示范、支撑保障等层次着手，形成了面向2035 年我国高端光学元件超精密制造技术路线图。针对性提出了优化创新体系设置、组织优势资源成立技术联盟，加大资源保障力度、布局基础研究和技术攻关计划，加强人才培育、构建梯队并扩大队伍规模，筑牢产业发展基础、培育龙头企业和专精特新“小巨人”企业等发展建议，以期促进高端光学元件加工产业提升与高质量发展。

关键词：光学元件；精密制造；超精密机床；超精密加工；光学加工

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Development and application prospects of piezoelectric precision driving technology

ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei

《机械工程前沿（英文）》 2008年第3卷第2期页码 119-132 doi: 10.1007/s11465-008-0034-1

摘要： With the rapid development of science and technology, microelectronics manufacturing, photonics technology, space technology, ultra-precision machining, micro-robotics, biomedical engineering and other fields urgently need the support of modern precision driving theory and technology. Modern precision driving technology can be generally divided into two parts: electromagnetic and non-electromagnetic driving technology. Electromagnetic driving technology is based on traditional technology, has a low thrust-weight ratio, and needs deceleration devices with a cumbrous system or a complex structure. Moreover, it is difficult to improve positioning accuracy with this technology type. Thus, electromagnetic driving technology is still unable to meet the requirements for the above applications. Non-electromagnetic driving technology is a new choice. As a category of non-electromagnetic driving technology, piezoelectric driving technology becomes an important branch of modern precision driving technology. High holding torque and acute response make it suitable as an accurate positioning actuator. This paper presents the development of piezoelectric precision driving technology at home and abroad and gives an in-depth analysis. Future perspectives on the technology’s applications in the following fields are described: 1) integrated circuit manufacturing technology; 2) fiber optic component manufacturing technology; 3) micro parts manipulation and assembly technology; 4) biomedical engineering; 5) aerospace technology; and 6) ultra-precision processing technology.

关键词： Electromagnetic ultra-precision processing technology piezoelectric cumbrous

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Full-band error control and crack-free surface fabrication techniques for ultra-precision fly cutting

F. H. ZHANG, S. F. WANG, C. H. AN, J. WANG, Q. XU

《机械工程前沿（英文）》 2017年第12卷第2期页码 193-202 doi: 10.1007/s11465-017-0448-8

摘要：

Large-aperture potassium dihydrogen phosphate (KDP) crystals are widely used in the laser path of inertial confinement fusion (ICF) systems. The most common method of manufacturing half-meter KDP crystals is ultra-precision fly cutting. When processing KDP crystals by ultra-precision fly cutting, the dynamic characteristics of the fly cutting machine and fluctuations in the fly cutting environment are translated into surface errors at different spatial frequency bands. These machining errors should be suppressed effectively to guarantee that KDP crystals meet the full-band machining accuracy specified in the evaluation index. In this study, the anisotropic machinability of KDP crystals and the causes of typical surface errors in ultra-precision fly cutting of the material are investigated. The structures of the fly cutting machine and existing processing parameters are optimized to improve the machined surface quality. The findings are theoretically and practically important in the development of high-energy laser systems in China.

关键词： ultra-precision fly cutting large-aperture KDP crystals spatial frequency processing error

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Ultra-precision ductile grinding of BK7 using super abrasive diamond wheel

ZHAO Qingliang, Brinksmeier Ekkard, Riemer Oltmann, Rickens Kai

《机械工程前沿（英文）》 2007年第2卷第3期页码 350-355 doi: 10.1007/s11465-007-0061-3

摘要： In this paper, a novel conditioning technique using copper bonded diamond grinding wheels of 91 yD grain size and electrolytic in-process dressing (ELID) is first developed to precisely and effectively condition a nickel-electroplated monolayer coarse-grained diamond grinding wheel of 151 μm grain size. Under optimised conditioning parameters, the super abrasive diamond wheel was well conditioned in terms of a minimized run-out error and flattened diamond grain surfaces of constant peripheral envelope. The conditioning force was monitored by a force transducer, while the modified wheel surface status was in-situ monitored by a coaxial optical distance measurement system. Finally, the grinding experiment on BK7 was conducted using the well-conditioned wheel with the corresponding surface morphology and subsurface damage measured by atomic force microscope (AFM) and scanning electric microscope (SEM), respectively. The experimental result shows that the newly developed conditioning technique is applicable and feasible to ductile grinding optical glass featuring nano scale surface roughness, indicating the potential of super abrasive diamond wheels in ductile machining brittle materials.

关键词： ELID peripheral electrolytic in-process nickel-electroplated monolayer measurement

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面向大幅面金属增材抛光的激光扫描振镜与伺服台协同控制系统 Article

崔梦嘉, 卢立斌, 张震, 管迎春

《工程（英文）》 2021年第7卷第12期页码 1732-1740 doi: 10.1016/j.eng.2020.06.028

摘要：

为了满足高品质金属增材制造的迫切需求，本文创新地提出了一种以激光扫描振镜与精密伺服台协同控制为核心的大幅面激光精密抛光方法，以实现大幅面选区激光熔化（SLM）成形镍合金精密抛光。我们提出的协同控制系统主要包括主从式新型协同控制架构、运动矢量分解和误差合成等核心模块。研究实验结果表明，与传统步进-扫描方法相比，该协同控制系统实现了激光光斑连续运动，避免了拼接误差，加工效率提升了38.24%。由于激光扫描路径更流畅，相应能量分布更均匀，因此，大幅面抛光质量得到显著改善。本协同系统为大幅面、高精度、高效率的激光精密加工提供了重要途径，在航空航天、新能源、高端模具、医疗器械等精密制造领域具有广阔的应用前景。

关键词：协同控制激光制造拼接误差激光抛光大幅面

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静电自组装制备复合磨粒及其对铜的抛光特性研究

黄亦申,许雪峰,姚春燕,胡建德,彭伟

《中国工程科学》 2012年第14卷第10期页码 82-89

摘要：

研究苯代三聚氰胺甲醛（BGF）微球与阳离子型聚电解质聚二烯丙基二甲基氯化铵（PDADMAC）、阴离子型聚电解质聚4－苯乙烯璜酸钠（PSS）之间的吸附特性，利用静电自组装技术改变和控制BGF微球的荷电特性，制备出不同形式的PEi BGF/SiO2复合磨粒，以Zeta电位、透射电子显微镜（TEM）和热重分析（TG）等手段对复合磨粒进行了表征，并利用这些复合磨粒制备了铜片抛光用的复合磨粒抛光液。抛光试验表明，吸附在聚合物微球表面和游离于抛光液中的SiO2磨粒在抛光中均起到材料去除作用。传统单一SiO2磨粒抛光液的铜材料去除率为264 nm/min，PE0 BGF/SiO2混合磨粒抛光液的铜材料去除率为348 nm/min，PE3 BGF/SiO2复合磨粒抛光液的铜材料去除率为476 nm/min。经上述3种抛光液抛光后的铜表面，在5 μm×5 μm范围内，表面粗糙度Ra从0.166 μm分别降至3.7 nm、2.6 nm和1.5 nm，峰谷值Rpv分别小于20 nm、14 nm和10 nm，复合磨粒抛光液对铜片有良好的抛光性能。

关键词：化学机械抛光抛光液复合磨粒聚电解质铜片

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Review on mechanism and process of surface polishing using lasers

Arun KRISHNAN, Fengzhou FANG

《机械工程前沿（英文）》 2019年第14卷第3期页码 299-319 doi: 10.1007/s11465-019-0535-0

摘要： Laser polishing is a technology of smoothening the surface of various materials with highly intense laser beams. When these beams impact on the material surface to be polished, the surface starts to be melted due to the high temperature. The melted material is then relocated from the ‘peaks to valleys’ under the multidirectional action of surface tension. By varying the process parameters such as beam intensity, energy density, spot diameter, and feed rate, different rates of surface roughness can be achieved. High precision polishing of surfaces can be done using laser process. Currently, laser polishing has extended its applications from photonics to molds as well as bio-medical sectors. Conventional polishing techniques have many drawbacks such as less capability of polishing freeform surfaces, environmental pollution, long processing time, and health hazards for the operators. Laser polishing on the other hand eliminates all the mentioned drawbacks and comes as a promising technology that can be relied for smoothening of initial topography of the surfaces irrespective of the complexity of the surface. Majority of the researchers performed laser polishing on materials such as steel, titanium, and its alloys because of its low cost and reliability. This article gives a detailed overview of the laser polishing mechanism by explaining various process parameters briefly to get a better understanding about the entire polishing process. The advantages and applications are also explained clearly to have a good knowledge about the importance of laser polishing in the future.

关键词： laser polishing surface roughness process parameters mechanism

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Numerical analysis of hydrodynamic process of circular-translational-moving polishing (CTMP)

ZHAI Wenjie, LIU Changxiong, LIANG Yingchun

《机械工程前沿（英文）》 2008年第3卷第4期页码 441-448 doi: 10.1007/s11465-008-0074-6

摘要： By keeping a pad moving relative to a wafer along a circular path without rotation, we developed a polishing technique called circular-translational-moving polishing (CTMP), which permits multidirectional polishing of the work piece and thus bears the advantage of isotropic polishing and a potential increase of material removal rate (MRR) on the wafer. To illuminate the mechanisms of CTMP and determine the optimum process variables in a CTMP process, a three-dimensional hydrodynamic lubrication model for CTMP with a smooth and rigid pad under a quasi-stable state is established in a polar coordinate system. The model equations are further calculated numerically by the finite difference method. The instantaneous distribution of fluid pressure is obtained, which shows that a negative pressure exists. The reason for negative pressure in CTMP and its effect on polishing is discussed. Moreover, the nominal clearance of the fluid film, roll, and pitch angles under different working conditions are obtained in terms of the applied load, moments, and polishing velocity. The obtained numerical analysis can be used as guidance for choosing operation parameters in a practical CTMP application.

关键词： numerical analysis practical CTMP circular-translational-moving polishing CTMP different